Paper Title:
Oxide and Nitride Thin Films: Processing and Characterization
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 437-438)
Edited by
M.O. Lai and L. Lu
Pages
193-194
DOI
10.4028/www.scientific.net/MSF.437-438.193
Citation
H. Chen, "Oxide and Nitride Thin Films: Processing and Characterization", Materials Science Forum, Vols. 437-438, pp. 193-194, 2003
Online since
October 2003
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Price
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