Paper Title:
Precision Thickness Measurement of Ultra-Thin Films via XPS
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 437-438)
Edited by
M.O. Lai and L. Lu
Pages
195-198
DOI
10.4028/www.scientific.net/MSF.437-438.195
Citation
S. J. Geng, S. Zhang, H. Onishi, "Precision Thickness Measurement of Ultra-Thin Films via XPS", Materials Science Forum, Vols. 437-438, pp. 195-198, 2003
Online since
October 2003
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Price
$32.00
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