A Quantitative Basis for Rocking Curve Measurement of Highly Oriented Polycrystalline Thin Films

A quantitative basis for rocking curve measurements of preferentially oriented polycrystalline thin films is presented. The Gaussian function is used for modeling the preferred orientation of crystallites around the plane normal of the specimen surface. A theoretical rocking curve is fitted to the observed curve by the least-squares method, and the degree of preferred orientation, given in volume fraction, can be derived from a refined preferred orientation parameter of the distribution function even when the preferred orientation is very small. Uses of diffractometers equipped with parallel-beam optics and the integrated intensity rather than peak intensity are important for reliable rocking curve measurement.