Structure and Phase Composition Study of Thin CdS and CdxZn1-xS Films |
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| Journal | Materials Science Forum (Volumes 443 - 444) |
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| Volume | European Powder Diffraction EPDIC 8 |
| Edited by | Yvonne Andersson, Eric J. Mittemeijer and Udo Welzel |
| Pages | 197-200 |
| DOI | 10.4028/www.scientific.net/MSF.443-444.197 |
| Citation | E.A. Maximovski et al., 2004, Materials Science Forum, 443-444, 197 |
| Online since | January, 2004 |
| Authors | E.A. Maximovski, N.I. Fainer, M. Rumyantsev |
| Keywords | CdxZn1-xS, CdS, Nanocrystal, Synchrotron Radiation (XRD), Thin Film, X-Ray Diffraction (XRD) |
| Abstract | Thin nanocrystalline CdS and CdxZn1-xS films have been synthesized on InP(100), Si(100), GaAs (100), sapphire(100) and fused silica substrates at low pressure (5 × 10-2-2 × 10 -1Torr)and in the temperature range of 473-673 K by remote plasma enhanced chemical vapor deposition (RPECVD) using Cd(S2CN(C2H5)2)2·C12H8N2 and Cd/Zn(S2CN(C2H5)2)2·C10H8N2 as single-source precursors. The influence of deposition conditions and type of substrates on physical and chemical properties of these films has been studied by X-ray diffraction of synchrotron radiation, HREM, SEM, SAED, ellipsometry, IR- and Raman spectroscopies, and EDS. |
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