Paper Title:
Structure and Phase Composition Study of Thin CdS and CdxZn1-xS Films
  Abstract

Thin nanocrystalline CdS and CdxZn1-xS films have been synthesized on InP(100), Si(100), GaAs (100), sapphire(100) and fused silica substrates at low pressure (5 × 10-2-2 × 10 -1Torr)and in the temperature range of 473-673 K by remote plasma enhanced chemical vapor deposition (RPECVD) using Cd(S2CN(C2H5)2)2·C12H8N2 and Cd/Zn(S2CN(C2H5)2)2·C10H8N2 as single-source precursors. The influence of deposition conditions and type of substrates on physical and chemical properties of these films has been studied by X-ray diffraction of synchrotron radiation, HREM, SEM, SAED, ellipsometry, IR- and Raman spectroscopies, and EDS.

  Info
Periodical
Materials Science Forum (Volumes 443-444)
Edited by
Yvonne Andersson, Eric J. Mittemeijer and Udo Welzel
Pages
197-200
DOI
10.4028/www.scientific.net/MSF.443-444.197
Citation
E.A. Maximovski, N.I. Fainer, M. Rumyantsev, "Structure and Phase Composition Study of Thin CdS and CdxZn1-xS Films", Materials Science Forum, Vols. 443-444, pp. 197-200, 2004
Online since
January 2004
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Price
$32.00
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