Paper Title:
X-Ray Scattering from Thin Films and Multilayers
  Abstract

Capability of the X-ray scattering for study of low-dimensional structures is illustrated on few examples. They are focused to the phase analysis, residual stress measurement, calculation of the stress-free lattice parameters, investigation of the anisotropic lattice deformation and preferred orientation in UN thin films. Further, the study of concentration profiles in functionally graded hard-metals and investigation of the multilayer degradation caused by soft annealing are discussed.

  Info
Periodical
Materials Science Forum (Volumes 443-444)
Edited by
Yvonne Andersson, Eric J. Mittemeijer and Udo Welzel
Pages
65-70
DOI
10.4028/www.scientific.net/MSF.443-444.65
Citation
D. Rafaja, "X-Ray Scattering from Thin Films and Multilayers", Materials Science Forum, Vols. 443-444, pp. 65-70, 2004
Online since
January 2004
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Price
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