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X-Ray Scattering from Thin Films and Multilayers

Journal Materials Science Forum (Volumes 443 - 444)
Volume European Powder Diffraction EPDIC 8
Edited by Yvonne Andersson, Eric J. Mittemeijer and Udo Welzel
Pages 65-70
DOI 10.4028/www.scientific.net/MSF.443-444.65
Citation David Rafaja, 2004, Materials Science Forum, 443-444, 65
Online since January, 2004
Authors David Rafaja
Keywords Functionally Graded Material (FGM), Glancing Angle X-Ray Diffraction (GAXRD), Low-Dimensional Structures, Small Angle X-Ray Scattering
Abstract

Capability of the X-ray scattering for study of low-dimensional structures is illustrated on few examples. They are focused to the phase analysis, residual stress measurement, calculation of the stress-free lattice parameters, investigation of the anisotropic lattice deformation and preferred orientation in UN thin films. Further, the study of concentration profiles in functionally graded hard-metals and investigation of the multilayer degradation caused by soft annealing are discussed.

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