Paper Title:
The Role of Impurities in the Formation of Voids in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 445-446)
Edited by
Toshio Hyodo, Yoshinori Kobayashi, Yasuyuki Nagashima, Haruo Saito
Pages
180-182
DOI
10.4028/www.scientific.net/MSF.445-446.180
Citation
P.J. Simpson, A.P. Knights, "The Role of Impurities in the Formation of Voids in Silicon", Materials Science Forum, Vols. 445-446, pp. 180-182, 2004
Online since
January 2004
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Price
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