Slow Positron Beam Investigations of Defects Caused by B+ Implantation into Epitaxial 6H-SiC |
| Journal |
Materials Science Forum (Volumes 445 - 446) |
| Volume |
Positron Annihilation - ICPA-13 |
| Edited by |
Toshio Hyodo, Yoshinori Kobayashi, Yasuyuki Nagashima, Haruo Saito |
| Pages |
36-38 |
| DOI |
10.4028/www.scientific.net/MSF.445-446.36 |
| Online since |
January, 2004 |
| Authors |
W. Anwand,
Gerhard Brauer,
Jan Kuriplach,
Wolfgang Skorupa
|
| Keywords |
6H-SiC, B+ Implantation, Boron Precipitates, Defect Annealing, Slow Positron Implantation Spectroscopy, Vacancy Type Defects |
| Full Paper |
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