Paper Title:
Design and Implementation of a S-Parameter Wafer Defect Scanner
| Periodical | Materials Science Forum (Volumes 445 - 446) |
|---|---|
| Main Theme | Positron Annihilation - ICPA-13 |
| Edited by | Toshio Hyodo, Yoshinori Kobayashi, Yasuyuki Nagashima, Haruo Saito |
| Pages | 501-503 |
| DOI | 10.4028/www.scientific.net/MSF.445-446.501 |
| Citation | P.S. Naik et al., 2004, Materials Science Forum, 445-446, 501 |
| Online since | January, 2004 |
| Authors | P.S. Naik, C.D. Beling, S. Fung |
| Keywords | Defect-Map, Imaging, Interactive, Resolution, S-Parameter |
| Price | US$ 28,- |
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