Paper Title:
Defect Characterization of the Structure-Growth Zone-Model for Sputter Deposited Cu Films
  Abstract

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Periodical
Materials Science Forum (Volumes 445-446)
Edited by
Toshio Hyodo, Yoshinori Kobayashi, Yasuyuki Nagashima, Haruo Saito
Pages
69-71
DOI
10.4028/www.scientific.net/MSF.445-446.69
Citation
J. De Baerdemaeker, C. Dauwe, D. Segers, C. Detavernier, D. Deduytsche, W. Egger, P. Sperr, "Defect Characterization of the Structure-Growth Zone-Model for Sputter Deposited Cu Films", Materials Science Forum, Vols. 445-446, pp. 69-71, 2004
Online since
January 2004
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