Paper Title:
Fabrication of Oxide/Semiconducting Coaxial Nanotubular Materials Using Atomic Layer Deposition
  Abstract

Novel fabrication routes of oxide/semiconducting hybrid nanotubes or coaxial nanocables with 30~200 nanometers of radius and ~10 micrometers of length using atomic layer deposition (ALD) and soluble nano-templates was reported. In order to fabricate the hybrid nanotubes using nanotemplates, which were treated with surface modification using SAMs in order to achieve selective deposition only onto inner wall of the template. Deposition of metal oxide layers (TiO2, ZrO2) conformally and uniformly onto the wall of templates using ALD. To fabricate metal oxide/CdS nanocables or coaxial nanotubes, CdS was deposited onto metal oxide nanotubes by chemical bath deposition. Coaxial nanocables was also 30-200 nm in diameter and 1-10  in lengths.

  Info
Periodical
Materials Science Forum (Volumes 449-452)
Edited by
S.-G. Kang and T. Kobayashi
Pages
1165-1168
DOI
10.4028/www.scientific.net/MSF.449-452.1165
Citation
D.K. Jeong, N.H. Park, S.-H. Jung, W. G. Jung, H. Shin, J.G. Lee, J.Y. Kim, "Fabrication of Oxide/Semiconducting Coaxial Nanotubular Materials Using Atomic Layer Deposition ", Materials Science Forum, Vols. 449-452, pp. 1165-1168, 2004
Online since
March 2004
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