Surface amorphization by shot peening in intermetallic compounds was examined. The formation of amorphous layer has been verified in Ti-Ni and Zr-Co-Ni alloys. In Ti-Ni alloy, an amorphous phase and nanocrystalline grains were detected by TEM for 120 s peening duration. However, recrystallization and grain growth occurred, when peening duration was up to 400 s. In Zr-Co-Ni alloy, an amorphous phase coexisting with nanocrystalline grains was observed in Zr-37Co-13Ni alloy. For other alloy compositions (Zr-50Co and Zr-50Ni), an amorphous phase was not observed, and nanocrystalline grains were observed. All the observed nanocrystalline grains may be recrystallized from amorphous phase, because their shape was spherical.