Paper Title:
Plasma Etching for Fabricating the Concave-Type DRAM Capacitors
  Abstract

The usage of barium strontium titanate (BST) capacitor have recently been considered in the fabrication of dynamic random access memory (DRAM) device. In this study, in order to avoid the difficulties of high aspect ratio etching of bottom electrode in the conventional stack-typecapacitor structure, we suggest to introduce a concave-type capacitor structure. The fabrication procedure of the two kinds of the concave capacitor cells, Pt/BST/Pt and Ru/BST/Ru are explained. We have studied on the metal electrode etching in the concave structure and have discussed the patterning issues in fabricating the capacitor structures.

  Info
Periodical
Materials Science Forum (Volumes 449-452)
Edited by
S.-G. Kang and T. Kobayashi
Pages
353-356
DOI
10.4028/www.scientific.net/MSF.449-452.353
Citation
H. W. Kim, "Plasma Etching for Fabricating the Concave-Type DRAM Capacitors", Materials Science Forum, Vols. 449-452, pp. 353-356, 2004
Online since
March 2004
Authors
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Sheng Guo Lu, Haydn Chen, C.L. Mak, K.H. Wong, H.W.L. Chan, C.L. Choy, Jian Jun Xu, Shao Qiu Shi
Abstract:Epitaxially graded barium strontium titanate (BaxSr1-x)TiO3 (x = 0.75, 0.8, 0.9, 1.0, abbreviated as BST75, BST80, BST90 and BTO...
1903
Authors: Kentaro Morito, Toshimasa Suzuki, Youichi Mizuno, Isao Sakaguchi, Naoki Ohashi, Kenji Matsumoto, Hajime Haneda
Abstract:The behavior of hydrogen in (Ba,Sr)TiO3 (BST) thin film capacitors under electric fields was investigated by performing secondary ion mass...
281
Authors: Naohiro Horiuchi, Takuya Hoshina, Hiroaki Takeda, Osamu Sakurai, Takaaki Tsurumi
Abstract:We investigated an influence of interface layer on a tunability of parallel plate (Ba, Sr)TiO3 thin film capacitors. BST thin film capacitors...
140
Authors: Li Ping Dai, Guo Jun Zhang, Shu Ya Wang, Zhi Qin Zhong
Chapter 11: Thin Films
Abstract:Subscript textReactive ion etching of barium strontium titanate (BST) thin films using an SF6/Ar plasma has been...
1964
Authors: Wei Chen, Shao Hua Qu, Wan Qiang Cao
Chapter 6: Composite Materials
Abstract:Ba0.9Sr0.1TiO3 ferroelectric ceramics with dopants of La2O3(0, 0.1, 0.1, 0.2 mol%) and Nb2O5(0,...
453