Aerosol Deposition Method for Fabrication of Nano Crystal Ceramic Layer |
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| Journal | Materials Science Forum (Volumes 449 - 452) |
|---|---|
| Volume | Designing, Processing and Properties of Advanced Engineering Materials |
| Edited by | S.-G. Kang and T. Kobayashi |
| Pages | 43-48 |
| DOI | 10.4028/www.scientific.net/MSF.449-452.43 |
| Citation | Jun Akedo, 2004, Materials Science Forum, 449-452, 43 |
| Online since | March, 2004 |
| Authors | Jun Akedo |
| Keywords | Aerosol, Ceramic Layer, Fine Particle, Micro-Electromechanical Systems (MEMS), Powder Processing, PZT, α -Al2O3 |
| Abstract | Aerosol deposition method (ADM) for shock-consolidation of fine ceramics powder to form dense and hard layers is reported. Submicron ceramic particles were accelerated by gas flow in the nozzle up to velocity of several hundred m/s. During interaction with substrate, these particles formed thick (10 ~ 100 µm), dense, uniform and hard ceramics layers. Depositions were fulfilled at room temperature. Every layer has polycrystalline structure with nano-meter order scale. The results of fabrications, microstructure, mechanical and electrical properties of oxides (α-Al2O3; Pb(Zr0.52,Ti0.48)O3 etc.) and non-oxides materials are presented. |
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