We investigated the effects of hydrogen annealing process on ferroelectricity in SrBi2Ta2O9(SBT) capacitors. The hydrogen-induced degradation of SBT capacitors was found after a hydrogen annealing process. The degraded properties could be recovered by re-crystallization annealing process in O2 ambient for 30 min. In order to prevent the catalyst reaction of Pt electrode known as an origin of hydrogen-induced degradation, Au top electrode was used. It was confirmed that Au electrode effectively prevented capacitors from degrading during hydrogen process.