Paper Title:
Hydrogen-Induced Degradation and Passivation of Ferroelectric SrBi2Ta2O9 Thin Films by Au Top Electrode
  Abstract

We investigated the effects of hydrogen annealing process on ferroelectricity in SrBi2Ta2O9(SBT) capacitors. The hydrogen-induced degradation of SBT capacitors was found after a hydrogen annealing process. The degraded properties could be recovered by re-crystallization annealing process in O2 ambient for 30 min. In order to prevent the catalyst reaction of Pt electrode known as an origin of hydrogen-induced degradation, Au top electrode was used. It was confirmed that Au electrode effectively prevented capacitors from degrading during hydrogen process.

  Info
Periodical
Materials Science Forum (Volumes 449-452)
Edited by
S.-G. Kang and T. Kobayashi
Pages
485-488
DOI
10.4028/www.scientific.net/MSF.449-452.485
Citation
H. S. Choi, H. J. Sung, S. G. Seo, Y. M. Jang, C. S. Son, I. H. Choi, "Hydrogen-Induced Degradation and Passivation of Ferroelectric SrBi2Ta2O9 Thin Films by Au Top Electrode", Materials Science Forum, Vols. 449-452, pp. 485-488, 2004
Online since
March 2004
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