Paper Title:
Data Bases for Modeling Plasma Devices for Processing of Integrated Circuits
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 453-454)
Edited by
Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic
Pages
15-20
DOI
10.4028/www.scientific.net/MSF.453-454.15
Citation
Ž. Nikitović, O. Šašić, Z.L. Petrović, G.N. Malović, A. Strinić, S. Dujko, Z. Raspopović, M. Radmilović-Radjenović, "Data Bases for Modeling Plasma Devices for Processing of Integrated Circuits ", Materials Science Forum, Vols. 453-454, pp. 15-20, 2004
Online since
May 2004
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