Data Bases for Modeling Plasma Devices for Processing of Integrated Circuits |
| Journal |
Materials Science Forum (Volumes 453 - 454) |
| Volume |
Progress in Advanced Materials and Processes |
| Edited by |
Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic |
| Pages |
15-20 |
| DOI |
10.4028/www.scientific.net/MSF.453-454.15 |
| Citation |
Željka Nikitović et al., 2004, Materials Science Forum, 453-454, 15 |
| Online since |
May, 2004 |
| Authors |
Željka Nikitović, O. Šašić, Z.Lj. Petrović, G.N. Malović, A. Strinić, S. Dujko, Z. Raspopović, M. Radmilović-Radjenović |
| Keywords |
Deposition, Diamond-Like Film, Electron, Methane, Plasma Etching, Plasma Modeling, Transport Coefficients |
| Full Paper |
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