Paper Title:
Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth
  Abstract

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Periodical
Materials Science Forum (Volumes 453-454)
Edited by
Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic
Pages
43-46
DOI
10.4028/www.scientific.net/MSF.453-454.43
Citation
S. Loreti, A. Santoni, R. Fryček, I. Menicucci, C. Minarini, D. Della Sala, "Metal-Induced Crystallization of Polycrystalline Silicon by In-Situ Excimer Laser Annealing During Low-Pressure CVD Growth ", Materials Science Forum, Vols. 453-454, pp. 43-46, 2004
Online since
May 2004
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