Comparison of Direct Numerical Procedure and Monte Carlo Technique to Determine the Charging Effects in Submicron Structures |
| Journal |
Materials Science Forum (Volumes 453 - 454) |
| Volume |
Progress in Advanced Materials and Processes |
| Edited by |
Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic |
| Pages |
9-14 |
| DOI |
10.4028/www.scientific.net/MSF.453-454.9 |
| Citation |
Z.Lj. Petrović et al., 2004, Materials Science Forum, 453-454, 9 |
| Online since |
May, 2004 |
| Authors |
Z.Lj. Petrović, S. Sakadžić, N. Spasojević, J. Matsui, T. Makabe |
| Keywords |
Boltzmann Equation, Charging, High Aspect Ratio, Monte-Carlo Simulation, Nanotechnology, Plasma Etching, Silicon Dioxide, ULSI |
| Full Paper |
Get the full paper by clicking here
|
