Comparison of Direct Numerical Procedure and Monte Carlo Technique to Determine the Charging Effects in Submicron Structures
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| Journal |
Materials Science Forum (Volumes 453 - 454) |
| Volume |
Progress in Advanced Materials and Processes |
| Edited by |
Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic |
| Pages |
9-14 |
| DOI |
10.4028/www.scientific.net/MSF.453-454.9 |
| Online since |
May, 2004 |
| Authors |
Z.Lj. Petrović,
S. Sakadžić,
N. Spasojević,
J. Matsui,
T. Makabe
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| Keywords |
Boltzmann Equation, Charging, High Aspect Ratio, Monte Carlo Simulation (MCS), Nanotechnology, Plasma Etching, Silicon Dioxide, ULSI |
| Full Paper |
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