Paper Title:
Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz
  Abstract

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Periodical
Materials Science Forum (Volumes 455-456)
Edited by
Rodrigo Martins, Elvira Fortunator, Isabel Ferreira, Carlos Dias
Pages
100-103
DOI
10.4028/www.scientific.net/MSF.455-456.100
Citation
R. Martins, H. Águas, I. Ferreira, E. Fortunato, L. Raniero, P. Roca i Cabarrocas, "Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz", Materials Science Forum, Vols. 455-456, pp. 100-103, 2004
Online since
May 2004
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