Paper Title:
Influence of the Rapid Thermal Annealing on the Properties of Thin a-Si Films
  Abstract

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Periodical
Materials Science Forum (Volumes 455-456)
Edited by
Rodrigo Martins, Elvira Fortunator, Isabel Ferreira, Carlos Dias
Pages
108-111
DOI
10.4028/www.scientific.net/MSF.455-456.108
Citation
N. Nedev, G. Beshkov, E. Fortunato, S.S. Georgiev, T. Ivanov, L. Raniero, S. Zhang, R. Martins, "Influence of the Rapid Thermal Annealing on the Properties of Thin a-Si Films", Materials Science Forum, Vols. 455-456, pp. 108-111, 2004
Online since
May 2004
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