Paper Title:
Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition
  Abstract

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Periodical
Materials Science Forum (Volumes 455-456)
Edited by
Rodrigo Martins, Elvira Fortunator, Isabel Ferreira, Carlos Dias
Pages
112-115
DOI
10.4028/www.scientific.net/MSF.455-456.112
Citation
L. Pereira, H. Águas, L. Raniero, R. M. S. Martins, E. Fortunato, R. Martins, "Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition", Materials Science Forum, Vols. 455-456, pp. 112-115, 2004
Online since
May 2004
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