Paper Title:

Deposition of SiO2 and SiO2:Ge Films for Optical Applications in a Matrix Distributed Electron Cyclotron Resonance Reactor

Periodical Materials Science Forum (Volumes 455 - 456)
Main Theme Advanced Materials Forum II
Edited by Rodrigo Martins, Elvira Fortunator, Isabel Ferreira, Carlos Dias
Pages 25-29
DOI 10.4028/www.scientific.net/MSF.455-456.25
Citation D. Daineka et al., 2004, Materials Science Forum, 455-456, 25
Online since May, 2004
Authors D. Daineka, P. Bulkin, G. Girard, J.-E. Bourée
Keywords Optical Thin Films, Optical Waveguide, VHF PECVD
Price US$ 28,-
Article Preview
View full size