Improvement of Field-Effect Mobilities in TFTs: Surface Plasma Treatments Vs Stack Dielectric Structures |
| Journal |
Materials Science Forum (Volumes 455 - 456) |
| Volume |
Advanced Materials Forum II |
| Edited by |
Rodrigo Martins, Elvira Fortunator, Isabel Ferreira, Carlos Dias |
| Pages |
64-68 |
| DOI |
10.4028/www.scientific.net/MSF.455-456.64 |
| Citation |
G. Lavareda et al., 2004, Materials Science Forum, 455-456, 64 |
| Online since |
May, 2004 |
| Authors |
G. Lavareda, C. Nunes de Carvalho, A. Amaral, Elvira Fortunato |
| Keywords |
a-SiCx, a-SiNx, a-SiOx, Dielectric Structure, Plasma Treatment, TFTs |
| Full Paper |
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