Sputtering Preparation of Silicon Nitride Thin Films for Gate Dielectric Applications |
| Journal |
Materials Science Forum (Volumes 455 - 456) |
| Volume |
Advanced Materials Forum II |
| Edited by |
Rodrigo Martins, Elvira Fortunator, Isabel Ferreira, Carlos Dias |
| Pages |
69-72 |
| DOI |
10.4028/www.scientific.net/MSF.455-456.69 |
| Online since |
May, 2004 |
| Authors |
Luís Pereira,
Hugo Águas,
Rui Igreja,
Rui Miguel S. Martins,
N. Nedev,
Leandro Raniero,
Elvira Fortunato,
Rodrigo Martins
|
| Keywords |
Gate Dielectric, Sputtering |
| Full Paper |
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