MIS Photodiodes of Polymorphous Silicon Deposited at Higher Growth Rates by 27.12 MHz PECVD Discharge |
| Journal |
Materials Science Forum (Volumes 455 - 456) |
| Volume |
Advanced Materials Forum II |
| Edited by |
Rodrigo Martins, Elvira Fortunator, Isabel Ferreira, Carlos Dias |
| Pages |
73-76 |
| DOI |
10.4028/www.scientific.net/MSF.455-456.73 |
| Citation |
Hugo Águas et al., 2004, Materials Science Forum, 455-456, 73 |
| Online since |
May, 2004 |
| Authors |
Hugo Águas, Luís Pereira, Leandro Raniero, Elvira Fortunato, Rodrigo Martins |
| Keywords |
Amorphous Silicon, MIS, PECVD 27MHz, Photodiode, Polymorphous Silicon |
| Full Paper |
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