Effect of Crucible Design on the Shape and the Quality in 6H-SiC Crystals Grown by Physical Vapor Transport |
| Journal |
Materials Science Forum (Volumes 457 - 460) |
| Volume |
Silicon Carbide and Related Materials 2003 |
| Edited by |
Roland Madar, Jean Camassel and Elisabeth Blanquet |
| Pages |
103-106 |
| DOI |
10.4028/www.scientific.net/MSF.457-460.103 |
| Citation |
Myung Yoon Um et al., 2004, Materials Science Forum, 457-460, 103 |
| Online since |
June, 2004 |
| Authors |
Myung Yoon Um, Ho Keun Song, Hoon Joo Na, Dae Hwan Kim, In Bok Song, Sang Yong Jung, Jae Kyeong Jeong, Jae Bin Lee, Hyeong Joon Kim |
| Keywords |
6H-SiC Crystal, Crucible, Physical Vapor Transport |
| Full Paper |
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