Paper Title:
Initial Oxidation of 6H-SiC (0001) (3 x 3)-R30° and 3 x 3 Surfaces Studied by AES and RHEED
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1313-1316
DOI
10.4028/www.scientific.net/MSF.457-460.1313
Citation
T. Aoyama, W. Voegeli, A. Ichimiya, Y. Hisada, S. Mukainakano, "Initial Oxidation of 6H-SiC (0001) (3 x 3)-R30° and 3 x 3 Surfaces Studied by AES and RHEED", Materials Science Forum, Vols. 457-460, pp. 1313-1316, 2004
Online since
June 2004
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