Paper Title:
Radical Nitridation of Ultra-Thin SiO2/SiC Structure
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1333-1336
DOI
10.4028/www.scientific.net/MSF.457-460.1333
Citation
H. Yano, Y. Furumoto, T. Niwa, T. Hatayama, Y. Uraoka, T. Fuyuki, "Radical Nitridation of Ultra-Thin SiO2/SiC Structure", Materials Science Forum, Vols. 457-460, pp. 1333-1336, 2004
Online since
June 2004
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