Paper Title:
Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1337-1340
DOI
10.4028/www.scientific.net/MSF.457-460.1337
Citation
L. Chen, O. J. Guy, G. Pope, K.S. Teng, T. Maffeis, S.P. Wilks, P. A. Mawby, T.E. Jenkins, A. Brieva, D.J. Hayton, "Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC", Materials Science Forum, Vols. 457-460, pp. 1337-1340, 2004
Online since
June 2004
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