Comparison between Various Chemical Systems for the CVD Step in the CF-PVT Crystal Growth Method |
| Journal |
Materials Science Forum (Volumes 457 - 460) |
| Volume |
Silicon Carbide and Related Materials 2003 |
| Edited by |
Roland Madar, Jean Camassel and Elisabeth Blanquet |
| Pages |
135-138 |
| DOI |
10.4028/www.scientific.net/MSF.457-460.135 |
| Citation |
Laurent Auvray et al., 2004, Materials Science Forum, 457-460, 135 |
| Online since |
June, 2004 |
| Authors |
Laurent Auvray, Didier Chaussende, Francis Baillet, Ludovic Charpentier, Michel Pons, Roland Madar |
| Keywords |
Bulk Growth, HTCVD, PVT |
| Full Paper |
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