Paper Title:
Characterization of a Thermal Oxidation Process on SiC Preamorphized by Ar Ion Implantation
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1357-1360
DOI
10.4028/www.scientific.net/MSF.457-460.1357
Citation
A. Poggi, R. Nipoti, S. Solmi, M. Bersani, L. Vanzetti, "Characterization of a Thermal Oxidation Process on SiC Preamorphized by Ar Ion Implantation", Materials Science Forum, Vols. 457-460, pp. 1357-1360, 2004
Online since
June 2004
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