In Situ SiC Feeding by Chemical Vapor Deposition for Bulk Growth |
| Journal |
Materials Science Forum (Volumes 457 - 460) |
| Volume |
Silicon Carbide and Related Materials 2003 |
| Edited by |
Roland Madar, Jean Camassel and Elisabeth Blanquet |
| Pages |
139-142 |
| DOI |
10.4028/www.scientific.net/MSF.457-460.139 |
| Citation |
Ludovic Charpentier et al., 2004, Materials Science Forum, 457-460, 139 |
| Online since |
June, 2004 |
| Authors |
Ludovic Charpentier, Francis Baillet, Didier Chaussende, Laurent Auvray, Michel Pons, Etienne Pernot, Roland Madar |
| Keywords |
Bulk, Chemical Vapor Deposition (CVD), Physical Vapor Transport, Silicon Carbide (SiC), Simulation |
| Full Paper |
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