Paper Title:
Advanced Processing Techniques for Silicon Carbide MEMS and NEMS
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1451-1456
DOI
10.4028/www.scientific.net/MSF.457-460.1451
Citation
C. A. Zorman, M. Mehregany, "Advanced Processing Techniques for Silicon Carbide MEMS and NEMS", Materials Science Forum, Vols. 457-460, pp. 1451-1456, 2004
Online since
June 2004
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Price
$32.00
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