Paper Title:
Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1515-1518
DOI
10.4028/www.scientific.net/MSF.457-460.1515
Citation
D. Panknin, P. Godignon, N. Mestres, E. K. Polychroniadis, J. Stoemenos, G. Ferro, J. Pezoldt, W. Skorupa, "Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation", Materials Science Forum, Vols. 457-460, pp. 1515-1518, 2004
Online since
June 2004
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