Paper Title:
Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1519-1522
DOI
10.4028/www.scientific.net/MSF.457-460.1519
Citation
X. A. Fu, J. Dunning, C. A. Zorman, M. Mehregany, "Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique ", Materials Science Forum, Vols. 457-460, pp. 1519-1522, 2004
Online since
June 2004
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