Paper Title:
Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1523-1526
DOI
10.4028/www.scientific.net/MSF.457-460.1523
Citation
J. Dunning, X. A. Fu, S. Rajgopal, M. Mehregany, C. A. Zorman, "Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices ", Materials Science Forum, Vols. 457-460, pp. 1523-1526, 2004
Online since
June 2004
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