Paper Title:
Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1527-1530
DOI
10.4028/www.scientific.net/MSF.457-460.1527
Citation
K. Rajanna, S. Tanaka, T. Itoh, M. Esashi, "Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film ", Materials Science Forum, Vols. 457-460, pp. 1527-1530, 2004
Online since
June 2004
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Price
$32.00
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