Paper Title:
Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1531-1536
DOI
10.4028/www.scientific.net/MSF.457-460.1531
Citation
X.M.H. Huang, X.L. Feng, M.K. Prakash, S. Kumar, C. A. Zorman, M. Mehregany, M.L. Roukes, "Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates", Materials Science Forum, Vols. 457-460, pp. 1531-1536, 2004
Online since
June 2004
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