Paper Title:
In-Situ Monitoring of AlN Crystal Growth on 6H-SiC by the Use of a Pyrometer
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1565-1568
DOI
10.4028/www.scientific.net/MSF.457-460.1565
Citation
T. Suzuki, T. Inushima, "In-Situ Monitoring of AlN Crystal Growth on 6H-SiC by the Use of a Pyrometer", Materials Science Forum, Vols. 457-460, pp. 1565-1568, 2004
Online since
June 2004
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