Surface Mechanisms in Homoepitaxial Growth on α-SiC{0001}-Vicinal Faces |
| Journal |
Materials Science Forum (Volumes 457 - 460) |
| Volume |
Silicon Carbide and Related Materials 2003 |
| Edited by |
Roland Madar, Jean Camassel and Elisabeth Blanquet |
| Pages |
163-168 |
| DOI |
10.4028/www.scientific.net/MSF.457-460.163 |
| Citation |
Shun-ichi Nakamura et al., 2004, Materials Science Forum, 457-460, 163 |
| Online since |
June, 2004 |
| Authors |
Shun-ichi Nakamura, Tsunenobu Kimoto, Hiroyuki Matsunami |
| Keywords |
{0001}-Vicinal Faces, Atomic Force Microscope (AFM), Chemical Vapor Deposition (CVD), Homoepitaxial Growth, Surface Step Structures |
| Full Paper |
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