Paper Title:
Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
169-174
DOI
10.4028/www.scientific.net/MSF.457-460.169
Citation
P. G. Neudeck, J. A. Powell, A. J. Trunek, D. J. Spry, "Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers", Materials Science Forum, Vols. 457-460, pp. 169-174, 2004
Online since
June 2004
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