Paper Title:
High-Speed Growth of High-Purity Epitaxial Layers with Specular Surface on 4H-SiC(000-1) Face
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
197-200
DOI
10.4028/www.scientific.net/MSF.457-460.197
Citation
K. Danno, T. Kimoto, H. Matsunami, "High-Speed Growth of High-Purity Epitaxial Layers with Specular Surface on 4H-SiC(000-1) Face ", Materials Science Forum, Vols. 457-460, pp. 197-200, 2004
Online since
June 2004
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