Paper Title:
Fast Epitaxial Growth of Thick 4H-SiC with Specular Surface by Chimney-Type Vertical Hot-Wall Chemical Vapor Deposition
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
205-208
DOI
10.4028/www.scientific.net/MSF.457-460.205
Citation
H. Fujiwara, K. Danno, T. Kimoto, T. Tojo, H. Matsunami, "Fast Epitaxial Growth of Thick 4H-SiC with Specular Surface by Chimney-Type Vertical Hot-Wall Chemical Vapor Deposition ", Materials Science Forum, Vols. 457-460, pp. 205-208, 2004
Online since
June 2004
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