Paper Title:
Comparative Studies of <0001> 4H-SiC Layers Grown with Either Silane or HexaMethylDisilane / Propane Precursor Systems
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
217-220
DOI
10.4028/www.scientific.net/MSF.457-460.217
Citation
C. Sartel, C. Balloud, V. Soulière, S. Juillaguet, J. Dazord , Y. Monteil, J. Camassel, S. Rushworth, "Comparative Studies of <0001> 4H-SiC Layers Grown with Either Silane or HexaMethylDisilane / Propane Precursor Systems", Materials Science Forum, Vols. 457-460, pp. 217-220, 2004
Online since
June 2004
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