Paper Title:
Vapour-Liquid-Solid Induced Localised Growth of Heavily Al Doped 4H-SiC on Patterned Substrate
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
241-244
DOI
10.4028/www.scientific.net/MSF.457-460.241
Citation
C. Jacquier, G. Ferro, P. Godignon, J. Montserrat, O. Dezellus, Y. Monteil, "Vapour-Liquid-Solid Induced Localised Growth of Heavily Al Doped 4H-SiC on Patterned Substrate ", Materials Science Forum, Vols. 457-460, pp. 241-244, 2004
Online since
June 2004
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