Paper Title:
Potential of HMDS/C3H8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100)
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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
281-284
DOI
10.4028/www.scientific.net/MSF.457-460.281
Citation
G. Ferro, S. Rushworth, J. Camassel, S. Juillaguet, C. Balloud, E. K. Polychroniadis, Y. Stoimenos, P. Seigle-Ferrand, J. Dazord , Y. Monteil, L.M. Smith, "Potential of HMDS/C3H8 Precursor System for the Growth of State of the Art Heteroepitaxial 3C-SiC Layers on Si(100) ", Materials Science Forum, Vols. 457-460, pp. 281-284, 2004
Online since
June 2004
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