Paper Title:
Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH3SiH3
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
325-328
DOI
10.4028/www.scientific.net/MSF.457-460.325
Citation
Y. Ikoma, R. Ohtani, T. Motooka, "Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH3SiH3 ", Materials Science Forum, Vols. 457-460, pp. 325-328, 2004
Online since
June 2004
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