Paper Title:
Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
431-436
DOI
10.4028/www.scientific.net/MSF.457-460.431
Citation
R. T. Bondokov, N. Tipirneni, D. I. Cherednichenko, T. S. Sudarshan, "Modification of 6H-SiC Surface Defect Structure during Hydrogen Etching", Materials Science Forum, Vols. 457-460, pp. 431-436, 2004
Online since
June 2004
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Price
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