Paper Title:
Evaluation of Free Carrier Lifetime and Deep Levels of the Thick 4H-SiC Epilayers
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
565-568
DOI
10.4028/www.scientific.net/MSF.457-460.565
Citation
T. Tawara, H. Tsuchida, S. Izumi, I. Kamata, K. Izumi, "Evaluation of Free Carrier Lifetime and Deep Levels of the Thick 4H-SiC Epilayers", Materials Science Forum, Vols. 457-460, pp. 565-568, 2004
Online since
June 2004
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