Paper Title:
Photoluminescence Mapping of a SiC Wafer in Device Processing
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
569-572
DOI
10.4028/www.scientific.net/MSF.457-460.569
Citation
M. Tajima, T. Sugahara, N. Hoshino, S. Tanimoto, T. Takahashi, S. Nakashima, T. Yamamoto, "Photoluminescence Mapping of a SiC Wafer in Device Processing", Materials Science Forum, Vols. 457-460, pp. 569-572, 2004
Online since
June 2004
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