Paper Title:
Optical Investigation of Stacking Faults and Micro-Crystalline Inclusions In-Low-Doped 4H-SiC Layers
  Abstract

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Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
577-580
DOI
10.4028/www.scientific.net/MSF.457-460.577
Citation
S. Juillaguet, C. Balloud, J. Pernot, C. Sartel, V. Soulière, J. Camassel, Y. Monteil, "Optical Investigation of Stacking Faults and Micro-Crystalline Inclusions In-Low-Doped 4H-SiC Layers", Materials Science Forum, Vols. 457-460, pp. 577-580, 2004
Online since
June 2004
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